Products

LINA

The LINA System is a new generation of Boat Auto Loader for Horizontal furnace.

Using a Cartesian lift, the LINA will automatically load/unload multiple type of boat from Furnace paddle to buffer/Load port and back.

With his multiple boat handling system, we can manage different process avoiding cross contamination.

The LINA coupled with a shuttle and a Comet wafer transfer system could provide a full complete handling solution.

150/200mm or 300mm Furnace Automation

Different configuration are possible:

For Maintenance purpose, the lift can be removed from load station (on wheels design)

The R2D automation offering for the semiconductor industry includes the following :

R2D proven COMET system for wafer transfer between transport cassette and quartz boat
A Lift for transfer of the quartz boats to and from the loader on the furnace (paddle)
Extra options available: SECS/GEM, notch aligning, storage/buffer positions, ESD combs, ionizer..
*R2D is a worldwide leading automation company specialized in semiconductor wafer handling.

300mm Diffusion Furnace Automation

300MM Automation :

Operator or OHT places Foup on SMIF / LP station or operator place directly the quartz boat on LP.
Wafers are transferred from FOUP to SiC/Quartz boat from horizontal to vertical position
Lift transfers boat to paddle

150- 200mm or 300mm Automation :

Operator Places full cassettes on Load Port or on a Comet WTS (integration possible)
Wafers are transferred from cassette to SiC/Quartz boat using the Comet
Lift transfers boat to paddle

SPECIFICATIONS

Wafer Size: from 150mm/200mm or 300mm

Lift Dimension :1360 x 22360 (can be customized)

TRANSFER MODE:

PERFORMANCE

SPÉCIFICATIONS

FACILITIES REQUIREMENTS

STANDARD SAFETY FEATURES

AVAILABLE OPTION :