Fully automatic, the COMET 4 station allows the transfer of 2 wafer batches from 2 cassettes to other cassettes or boats.
Customized to meet your different cassettes, boats and wafers specifications needs, the COMET 4 station is fast, clean, reliable and accurate, and it saves valuable space thanks to its small footprint.
Simple to use and easy to maintain, the COMET 4 station is a one button system operation, fully automatic, free hand operating, set up and controlled manualy directly from the front panel keyboard. All electronic parts are compatible for all COMET machines.
Moreover , the COMET 4 station is compatible with SECS-GEM communication, SECSI or HSMS protocol, thanks to its R2S232 and TCP/IP communication port available on the rear side of the machine, and can be integrated in your process line (OEM customer), with Robotic arm and elevator.
Key system features
Standard features
Software flexibility
Specifications:
Performance
Facilities and Requirements:
Options
