Transfer 25 TO 25 3″ to 8″
The Comet 2 station with flip system is a friendly, clean, reliable and robust Mass Wafer Transfer system, customized for your different boats and carriers.
The 2 station with flip allows the transfer of 25 wafers from transport cassette to 25 position process boat with a complete rotation of the wafers.
Fully automatic, the 2 Station can be integrated inside a WET bench.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Easy to integrate in your process line and customizable (OEM customer).
Integrated Infrared Heat Sensor.
Simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.
Can be integrated with Robotic arm and elevator
FULLY AUTOMATIC with flip FREE HAND OPERATING
- Flat or notch aligner
- SECSII-GEM communication
- ESD combs
- Cycle time: < 1 mn
- Uptime: 99.8%
- MTBF: > 4000hrs
- MTBA: 750 hrs
- MTTR: < 1hr
- MTTA: 0.005 hr
- Breakage rate: 1 for 5.105
- Standard safety features
- Peek material for pushers, retainers and boat adaptors
- IR heat sensor
- Double cassette sensors
- Boat sensor
- Wafer detection into cassette
- Wafer detection into boat
- Current limit on all motors
- Power « off » security
- Automatic home position
- Carrier correctly positioned (mechanical)
- Historical data recorded (error messages data time)
Facilities and Requirements:
- Weight: 45 kg
- Power: 100-240 VAC 75 watts
- Frequency: 50-60 Hz
- Full Load Amps: 1.2-0.6 A
- No need for compressed air
- CE certification
- SEMI Standard
- Class 1
- Transfer parameters adjustable to reduce cycle time
- Security sensor management
- RS 232 host connection