Transfer 25 TO 25, 3″ to 8″
Using Comet 3 station with flip is the easiest way to transfer 25 wafers face to face (or back to back).
Proximity or same slot process.
The best mass transfer system for a safe back to back transfer.
Adapted for Solid Source,WET or LTO process.
This Comet is Fast, clean, reliable and accurate.
Customized for your different boats and carriers.
Compatible with your communication requirements and other manufacturer’s processing equipment.
Integrated Infrared Heat Sensor simple to use and easy to maintain.
One button system operation.
LCD display indicating all cycle steps.
Set up machine directly from the keyboard.
Electronic Parts compatible for all Comet.
- Flat or notch aligner
- SECSII-GEM communication
- ESD combs
- Cycle time: < 1 mn
- Uptime: 99.8%
- MTBF: > 4000hrs
- MTBA: 750 hrs
- MTTR: < 1hr
- MTTA: 0.005 hr
- Breakage rate: 1 for 5.105
- Standard safety features
- Peek material for pushers, retainers and boat adaptors
- IR heat sensor
- Double cassette sensors
- Boat sensor
- Wafer detection into cassette
- Wafer detection into boat
- Current limit on all motors
- Power « off » security
- Automatic home position
- Carrier correctly positioned (mechanical)
- Historical data recorded (error messages data time)
Facilities and Requirements:
- Weight: 65 kg
- Power: 100-240 VAC 75 watts
- Frequency: 50-60 Hz
- Full Load Amps: 1.2-0.6 A
- No need for compressed air
- CE certification
- SEMI Standard
- Class 1
- Transfer parameters adjustable to reduce cycle time
- Security sensor management
- RS 232 host connection